Study of Gallium-Doped Zinc Oxide Thin Films Processed by Atomic Layer Deposition and RF Magnetron Sputtering for Transparent Antenna Applications
Authors :
Lunca-Popa P., Chemin J.B., Adjeroud N., Kovacova V., Glinsek S., Valle N., El Hachemi M., Girod S., Bouton O., Maris J.P.
Reference :
ACS Omega, vol. 8, n° 6, pp. 5475-5485, art. no. A786, 2023
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