Atmospheric-pressure synthesis of atomically smooth, conformal, and ultrathin low-k polymer insulating layers by plasma-initiated chemical vapor deposition
D. Abessolo Ondo, F. Loyer, F. Werner, R. Leturcq, P. J. Dale, and N. D. Boscher
ACS Applied Polymer Materials, vol. 1, no. 12, pp. 3304-3312, 2019