Chemical vapor deposition of CoFe2O4 micropillar arrays with enhanced magnetic properties
Auteurs
Aspe B., Malyeyev A., Vakilinejad A., Menguelti K., Michels A., Bahlawane N.
Référence
Journal of Alloys and Compounds, vol. 890, art. no. 161758, 2022
Description
Single-step thermal chemical vapor deposition was optimized at 400 °C for the growth of CoFe2O4 spinel thin films starting from the corresponding metal acetylacetonate precursors. Enhanced magnetization was observed for conditions leading to a columnar growth with a preferred (100) orientation. The implemented liquid precursor delivery secured a reliable films’ composition control and a straightforward dosage of acetylacetone, as a molecular growth inhibitor, to enhance the film conformality on structured surfaces. The optimized conditions enabled an efficient micro-pore filling, and the fabricated ordered micropillar arrays feature a coercivity of 1.8 kOe and a saturation magnetization of 350 emu/cm3. The implemented state-of-the-art up-scalable microfabrication technology, the reasonable thermal budget and the resulting high magnetic performance pave the way towards the development of innovative magnetoelectric devices.
Lien
doi:10.1016/j.jallcom.2021.161758
