SIMS on the helium ion microscope: A powerful tool for high-resolution high-sensitivity nano-analytics

Auteurs

T. Wirtz, D. Dowsett, and P. Philipp

Référence

in Helium Ion Microscopy, G. Hlawacek and A. Gölzhäuser (Eds.), pp. 297-323, 2016

Description

Secondary Ion Mass Spectrometry (SIMS ) is an extremely powerful technique for analysing surfaces, owing in particular to its excellent sensitivity , high dynamic range , very high mass resolution , and ability to differentiate between isotopes . The combination of He/Ne microscopy and SIMS makes it possible not only to obtain SIMS information limited only by the size of the probe–sample interaction (~10 nm), but also to directly correlate such SIMS images with high-resolution (0.5 nm) secondary electron images of the same zone taken at the same time. This chapter will discuss the feasibility of combining SIMS with Helium Ion Microscopy from a fundamental and instrumental point of view.

Lien

doi:10.1007/978-3-319-41990-9_13