Transparent piezoelectric transducers for large area ultrasonic actuators

Auteurs

D. Sette, S. Girod, N. Godard, N. Adjeroud, J. B. Chemin, R. Leturcq, and E. Defay

Référence

in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 793-796, 2017

Description

Piezoelectric thin films have been extensively deployed in MEMS components for both actuation and sensing applications [1]–[3]. MEMS devices are mainly manufactured on silicon substrates and large efforts have been achieved to stabilize the fabrication process of piezoelectric thin films. Physical vapor deposition (PVD) and Chemical Solution Deposition (CSD), which include sol-gel and metal-organic decomposition techniques, have reached industrial maturity [4], [5]; while Pulsed Laser Deposition (PLD) techniques are still under development even though homogeneous PZT thin films on 6” silicon wafers have been realized [6]. Moreover, recent works have demonstrated the fabrication of PZT thin films on glass substrates exhibiting well-crystallized perovskite phase and transmittance in the visible range higher than 50 % [7].

Lien

doi: 10.1109/MEMSYS.2017.7863527